MEMS REFERENCE PAGE

MEMS Information Sources

• Tutorial Information about MEMS (ISI Clearinghouse)
• MEMS Exchange - MEMS fabrication network
• The ISI MEMS Clearinghouse - A MEMS information resource.
• The DARPA MEMS Program
• The MIT Semiconductor Subway
• Microelectromechanical Systems in Japan (lots of links)
• European Microsystems Technology Online (EMSTO)

Research Centers and Laboratories:

• Sandia National Laboratories - Intelligent Micromachine Initiative - MEMS research and development.
• NASA: MicroInstrument Technology
• Caltech - Micromachining Lab
• Stanford TCAD MEMS Projects
• MIT
• Microsystems Technology Lab (MTL)
• Nanostructures Laboratory
• Bioinstrumentation Lab: Electronic Systems, Micro-Systems and Nano-Robotics Research Group
• Gas Turbine Laboratory, Power MEMS and "Turbines on a dime" Magazine Article
• Cornell Nanofabrication Facility and Noel C. McDonald's MEMS Lab
• Princeton University: Nanostructure Lab
• Carnigie Mellon: Microelectromechanical Systems Laboratory
• UC Berkeley Sensor & Actuator Center
• University of California, Los Angeles - Micromachining (MEMS)
• University of Southern California: Dept. of Materials Science; Electrochemical Fabrication (EFAB)
• University of Cincinnati - Center for Microelectronic Sensors and MEMS; Many links
• University of Colorado at Boulder: MEMS Research - research in RF, optoelectronic, and reliability MEMS.
• University of Illinois at Chicago: Microfluidics Center; Microfabrication Applications Lab
• University of Illinois at Urbana-Champaign - Micro Actuators, Sensors and Systems Group (MASS)
• University of New York, Albany: New York State Center for Advanced Thin Film Technology
• University of Utah: Micro Instrumentation Laboratory - MEMS research, instruction, and short courses.
• University of Washington: Center for Nanotechnology; Center for Applied Microtechnology (many links)
• University of Wisconsin, Madison: MicroElectroMechanical Systems - Laboratory of Professor Henry Guckel.
• Case Western Reserve University: MEMS Resource
• Ohio State University: Bio-MEMS Group Projects; Microfluidics; links page
• Northeastern University: Microfabrication Laboratory & 3D Microelectronics
• UK
• University of Edinburgh: Micro-Systems Technology
• Institute of Molecular & Biomolecular Electronics, University of Wales, Bangor
• The Queen's University of Belfast
• Laboratory for Applied Microsystems, ECAD, Cardiff
• Durham
• Heriot-Watt University
• Northeast Microelectronice Center (NEMEC)
• Central Microstructure Facility, RAL
• University of Southampton Microelectronics Centre MEMS Group
• Science and Technology Research Center (STRC); Microfluidics and Microengineering
• Japan
• The Micromachine Center in Japan.
• Other International
• Korea Advanced Institute of Science and Technology (South Korea) - Micromachines and Microsystems Laboratory - MEMS research and education in electronics, photonics, and bionics areas combined with     micromechanics.

Companies

• Alberta Microelectronics Corp.; Microfluidics, FAB capacity
• Analog Devices - Acceleromters & iMEMS^®; Surface-micromachining technology for inertial devices.
• BFGoodrich Advanced Micromachines (AMMI)
• Caliper Technologies; Microfluidics; Bioanalyzers
• Canopus Systems; Inertial and environmental sensors; FAB capacity?
• Cephied; Microfluidics, microdiagnostics
• Cronos Integrated Microsystems; MEMS Technology Application Center (old page)
• Chronos TechNet page
• Integrated Micromachines, Inc.; pressure sensors and microrelays
• Gamera Bioscience; Microfluidics base lab tests with OSU
• Microcosm Technologies, Inc. ; MEMCAD design software
• Microflow Enginerring; Microfluidics
• Nanovation Technologies Inc.; optical components for networks
• Nanostructures, Inc.; MEMS fabrication
• LEISTER Process Technologies
• Optron Systems; Optical systems
• Orchid Biocomputer; Diagnostics and microfluidics
• Resonetics; Laser micromachining
• TRW Lucas Novasensor;  Silicon sensors and Custom Microstructures.
• Texas Instruments; Digital Micromirror Devices
• Umachines, Inc.; MEMS flow sensors

MEMS related sites

• Microelectronics and Computer Technology Corporation (MCC); Research Institute

Conferences

• The Micromachine Summit Conferences
• Actuator 2000, Bremen, Germany, Jun 19-21, 2000
• Solid-State Sensor and Actuator Workshop, Hilton Head, June 4-8, 2000
• SPIE BiOS 2000: Biomedical Optics, San Jose, CA, Jan. 22-28, 2000
• IEEE MEMS 2000 Conference; Jan. 23-27, 2000
• SPIE International Symposium on Microelectronics and Micro Electro Mechanical Systems (MICRO/MEMS); Gold Coast, Queensland, Australia, Oct. 27-29, 1999
• TRANSDUCERS - International Conference on Solid-State Sensors and Actuators (June 16-19, 1997)
• MEMS 97 - MICRO ELECTRO MECHANICAL SYSTEM (January 26-30, 1997)
• Commercialization of Microsystems - Sensors, Actuators, Machines (Oct 6-10, 1996)
• 1996 Solid-State Sensor and Actuator Workshop (Hilton Head 1996)

Papers

• An Introduction To Micromechanical Systems by Greg Goebel